Simco-Ion Extended ISO Class 1 Ultra-clean Modulated Pulse AeroBar Model 5635
Simco-Ion’s AeroBar MP Ionizing Bar Model 5635 is specifically designed to eliminate static charge in the semiconductor and other clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultraclean emitter points and precision adjustment, provides “Extended ISO Class 1” cleanliness, critical for smaller technology nodes. For processes that do not require extreme cleanliness, the optional air-assist accelerates ion delivery, providing faster discharge times and performance over longer distances.
Extended ISO Class I cleanliness
Modulated pulse technology
Excellent lateral uniformity
Low field voltages
Air-assist capability
Quarter-turn nozzles
Optional software with easy-to-use interface with wide adjustability
150-1000 mm distance to surface; application & customer specification dependent
Frequency
Default setting at 5 Hz; adjustable from 1-33 Hz
Balance
Auto balancing system <±20V over time and across the bar length (measured in a controlled environment at 24″ distance)
Ion Emission
Modulated pulse (MP) technology
Emitter Points
Single Crystal Silicon emitter points
Emitter Pitch
50 mm or 75 mm spacing between nozzles; 50 mm spacing only on the 450 mm and 600 mm lengths
Air Supply
Clean dry air (CDA) or nitrogen
Airflow
45 psi max gas pressure; 1-3.5 lpm/nozzle thru 8 mm OD one-touch fitting (optional)
Ozone
<0.05 ppm
EMI
Below background level
Operating Env.
Temperature 15-35°C (59-95°F); humidity 30-60% RH, non-condensing
Bar Settings
DIP switches for general power settings; trimpots for fine tuning balance, frequency, and power output or use the serial output to the MP 5635 Bar Control software for fine adjustments
Enclosure
ABS chassis
Dimensions
3.1H x 1.3W x 18/24/34/39/45/51/57/63/69/75/81/87/93L in. (78H x 34W x 450/600/850/1000/1150/1300/1450/1600/1750/1900/2050/2200/2350L mm)
