Simco-Ion Extended ISO Class 1 Ultra-clean Modulated Pulse AeroBar Model 5635

$1,260.00$2,540.00

Simco-Ion’s AeroBar MP Ionizing Bar Model 5635 is specifically designed to eliminate static charge in the semiconductor and other clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultraclean emitter points and precision adjustment, provides “Extended ISO Class 1” cleanliness, critical for smaller technology nodes. For processes that do not require extreme cleanliness, the optional air-assist accelerates ion delivery, providing faster discharge times and performance over longer distances.

  • Extended ISO Class I cleanliness
  • Modulated pulse technology
  • Excellent lateral uniformity
  • Low field voltages
  • Air-assist capability
  • Quarter-turn nozzles
  • Optional software with easy-to-use interface with wide adjustability
  • Alarm output signal
SPEC SHEET
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Description

Input Voltage24 VDC ±10%
Output Voltage13.5 kV p-p (max), adjustable
Distance150-1000 mm distance to surface; application & customer specification dependent
FrequencyDefault setting at 5 Hz; adjustable from 1-33 Hz
BalanceAuto balancing system <±20V over time and across the bar length (measured in a controlled environment at 24″ distance)
Ion EmissionModulated pulse (MP) technology
Emitter PointsSingle Crystal Silicon emitter points
Emitter Pitch50 mm or 75 mm spacing between nozzles; 50 mm spacing only on the 450 mm and 600 mm lengths
Air SupplyClean dry air (CDA) or nitrogen
Airflow45 psi max gas pressure; 1-3.5 lpm/nozzle thru 8 mm OD one-touch fitting (optional)
Ozone<0.05 ppm
EMIBelow background level
Operating Env.Temperature 15-35°C (59-95°F); humidity 30-60% RH, non-condensing
Bar SettingsDIP switches for general power settings; trimpots for fine tuning balance, frequency, and power output or use the serial output to the MP 5635 Bar Control software for fine adjustments
EnclosureABS chassis
Dimensions3.1H x 1.3W x 18/24/34/39/45/51/57/63/69/75/81/87/93L in. (78H x 34W x 450/600/850/1000/1150/1300/1450/1600/1750/1900/2050/2200/2350L mm)